Interferometry in the XUV / EUV regime

We offer specialized interferometers for EUV radiation. Depending on the application, the scanning range, spatial resolution and spectral bandwidth can be modified.

Key facts
  • scanning range: micrometers up to meters
  • spatial resolution: <5 nm
  • spectral range: choosable
  • spectral width: choosable
  • ultra high vacuum (UHV, < E-8 mbar) is available