Interferometry in the XUV / EUV regime

We offer specialized interferometers for EUV radiation. Depending on the application, the scanning range, spatial resolution and spectral bandwidth can be modified.

• scanning range: micrometers up to meters
• spatial resolution: <5 nm
• spectral range: choosable
• spectral width: choosable
• ultra high vacuum (UHV, < E-8 mbar) is available