Interferometry in the XUV / EUV regime

We offer specialized interferometers for EUV radiation. Depending on the application, the scanning range, spatial resolution and spectral bandwidth can be modified.

Key facts

  • scanning range: micrometers up to meters
  • spatial resolution: <5nm
  • spectral range: choosable
  • spectral width: choosable
  • down to UHV (< E-8 mbar) available