Interferometry in the XUV / EUV regime
We offer specialized interferometers for EUV radiation. Depending on the application, the scanning range, spatial resolution and spectral bandwidth can be modified.
- scanning range: micrometers up to meters
- spatial resolution: <5 nm
- spectral range: choosable
- spectral width: choosable
- ultra high vacuum (UHV, < E-8 mbar) is available