PRODUCTS

Our cutting-edge optical instruments are designed for advanced spectroscopy, imaging, and metrology in extreme ultraviolet and soft x-ray applications. We specialize in high-performance beamlines, spectrometers, monochromators, and reflectometers, delivering precision at the nanometer and picometer scale. Our non-destructive EUV inspection systems provide advanced solutions for optics, masks, semiconductor components, and nanostructure inspection.

BEAMLINES

Our beamlines are versatile and highly customizable, designed to meet the specific requirements of research and industrial applications. They offer precise beam shaping, transport, and diagnostics, ensuring optimal performance for spectroscopy, imaging, and metrology. With advanced optical components and flexible configurations, our beamlines provide reliable and efficient solutions for high-resolution experiments in extreme ultraviolet and soft x-ray ranges.

SPECTROSCOPY

Our spectrometer systems deliver high resolution and efficiency for spectroscopy, source diagnostics, and metrology. Designed for high harmonic generation and plasma sources, they can cover a spectral range from 2 to 100 nm. The resolution can theoretically reach up to λ/Δλ > 10000 in selected spectral regions. Multiple operation modes, motorized alignment, adaptable flanges, and ultra-high vacuum conditions ensure precision, efficiency, and seamless customization.

IMAGING

Our imaging solutions for microscopy, metrology, and diagnostics enable nanometer-scale resolution using advanced optics. We offer versatile designs, including multi-mirror objectives, Schwarzschild and Wolter-type geometries, Kirkpatrick-Baez systems, off-axis mirrors, and nano-focusing solutions. Optimized optics and coatings enhance throughput for narrowband or broadband use while minimizing aberrations.

INTERFEROMETRY

Our interferometry solutions enable high-precision measurements across various wavelengths for scientific and industrial applications. We offer designs such as Michelson, Mach-Zehnder, and aperture-splitting configurations (e.g., half-moon, hole-mirror) with customizable scanning range, spatial resolution, and spectral bandwidth.

Our interferometers achieve nanometer-scale resolution with scanning ranges from micrometers to several centimeters. Designed for time-resolved applications, they support femtosecond and attosecond measurements for autocorrelation, phase analysis, and wavefront characterization. Ultra-high vacuum compatibility is available.

CUSTOMIZATION

With a strong scientific and prototyping background, we understand the challenges of limited space, time, and budget in research and industry. That’s why we offer fully customized designs for all our products, adapting to your specific requirements. Whether modifying existing solutions, providing consultation, or developing new optical systems, instruments, or tools, we work closely with you to achieve optimal performance.

Our expertise covers optical and technical design, coatings, algorithms, motorization, imaging methods, vacuum systems, and automation. From optimizing spectral ranges and resolutions to integrating motorized alignment and remote operation, we ensure each system is precisely tailored to your needs. No matter the complexity, we develop innovative solutions that enhance efficiency, accuracy, and usability in your application.